Semiconductors
Wafer fabs and assembly and test plants: cleanrooms, ultrapure water, chillers and process utilities.
A fab runs around the clock, and a small drift in room pressure, humidity, chilled water or ultrapure water supply can scrap a whole batch of wafers. Instruments in the cleanroom, sub fab and utility buildings have to be stable, accurate and easy to verify.
We supply differential pressure gauges and transmitters for cleanroom pressure cascades and filter monitoring, humidity and temperature transmitters, airflow and air velocity measurement, flow switches and flow meters for ultrapure water, process cooling water and chemical skids, level transmitters and switches, trace moisture analysers for process gases, and thermal mass flow meters for compressed air and nitrogen.